Shutdown epi2 SNF 2010-10-27 11:56:54: wafer lift in chamber not working
tberg at snf.stanford.edu
tberg at snf.stanford.edu
Wed Oct 27 14:22:17 PDT 2010
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Shutdown epi2 SNF 2010-10-27 11:56:54: wafer lift in chamber not working
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Shutdown epi2 SNF 2010-10-27 19:24:09: wafer stuck in chamber A
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Adjusted lifter tested operation ran etch coat
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Shutdown epi2 SNF 2010-10-27 11:56:54: wafer lift in chamber not working
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Shutdown epi2 SNF 2010-10-27 19:24:09: wafer stuck in chamber A
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