Shutdown epi2 SNF 2010-10-27 19:24:09: wafer stuck in chamber A

cfchiang at snf.stanford.edu cfchiang at snf.stanford.edu
Wed Oct 27 19:24:09 PDT 2010


When tried to unload wafer from chamber A, error message popped up. "Chamber A lift cannot reach exchange position." So, the wafer is still in the system. Also, I put another wafer in LLB for its low pressure. Sorry but have to shut down the system.




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