Shutdown epi2 SNF 2010-10-27 19:24:09: wafer stuck in chamber A

maurice at snf.stanford.edu maurice at snf.stanford.edu
Thu Oct 28 09:42:43 PDT 2010


deleted wafer in chamber
created wafer in transfer chamber
homed robot rotation
manually moved wafer to load lock
-
Ted exercised the wafer lift
Andrew is running another wafer at temp to check handling




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