Comment epi2 SNF 2010-10-29 06:36:12: Had scrubber fault-reset
tberg at snf.stanford.edu
tberg at snf.stanford.edu
Fri Oct 29 06:36:13 PDT 2010
Previous message:
Shutdown epi2 SNF 2010-10-27 19:24:09: wafer stuck in chamber A
Next message:
Problem epi2 SNF 2010-10-29 12:22:22: aborted recipe due to main scrubber fault
Messages sorted by:
[ date ]
[ thread ]
[ subject ]
[ author ]
Previous message:
Shutdown epi2 SNF 2010-10-27 19:24:09: wafer stuck in chamber A
Next message:
Problem epi2 SNF 2010-10-29 12:22:22: aborted recipe due to main scrubber fault
Messages sorted by:
[ date ]
[ thread ]
[ subject ]
[ author ]
More information about the epi2-pcs mailing list