Problem epi2 SNF 2010-10-29 12:22:22: aborted recipe due to main scrubber fault

ehe at snf.stanford.edu ehe at snf.stanford.edu
Fri Oct 29 12:22:23 PDT 2010


error message was "ChA main scrubber fault - manual gas flows not allowed" - aborted halfway through run 




More information about the epi2-pcs mailing list