Problem epi2 SNF 2010-10-30 11:21:49: ChA main scrubber fault

cfchiang at snf.stanford.edu cfchiang at snf.stanford.edu
Sat Oct 30 11:21:50 PDT 2010

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The fault reported at 5am, saying Ch A main scrubber fault - manually gas flows not allowed. Chamber was brought to isolated.

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