October 2010 Archives by subject

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Starting: Fri Oct 1 09:26:40 PDT 2010
Ending: Sat Oct 30 11:21:50 PDT 2010
Messages: 59

Comment epi2 SNF 2010-09-16 15:11:50: etched/after bulb change maurice at snf.stanford.edu
Comment epi2 SNF 2010-09-17 01:06:16: LL-A problems/resolution maurice at snf.stanford.edu
Comment epi2 SNF 2010-10-01 17:02:13: DCS still unstable maurice at snf.stanford.edu
Comment epi2 SNF 2010-10-01 17:02:13: DCS still unstable maurice at snf.stanford.edu
Comment epi2 SNF 2010-10-04 07:56:28: DCS temp controller at 18.3 deg seymour at snf.stanford.edu
Comment epi2 SNF 2010-10-04 07:56:28: DCS temp controller at 18.3 deg tberg at snf.stanford.edu
Comment epi2 SNF 2010-10-04 10:05:23: testing DCS maurice at snf.stanford.edu
Comment epi2 SNF 2010-10-04 10:05:23: testing DCS maurice at snf.stanford.edu
Comment epi2 SNF 2010-10-11 14:33:00: AMAT finished testing tberg at snf.stanford.edu
Comment epi2 SNF 2010-10-11 14:33:00: AMAT finished testing maurice at snf.stanford.edu
Comment epi2 SNF 2010-10-11 18:46:54: wafer stuck junam at snf.stanford.edu
Comment epi2 SNF 2010-10-11 18:46:54: wafer stuck maurice at snf.stanford.edu
Comment epi2 SNF 2010-10-12 11:20:53: homed throttle valve tberg at snf.stanford.edu
Comment epi2 SNF 2010-10-12 11:20:53: homed throttle valve tberg at snf.stanford.edu
Comment epi2 SNF 2010-10-13 11:33:38: ran etches maurice at snf.stanford.edu
Comment epi2 SNF 2010-10-29 06:36:12: Had scrubber fault-reset tberg at snf.stanford.edu
Problem epi2 SNF 2010-08-03 10:31:12: backside coating maurice at snf.stanford.edu
Problem epi2 SNF 2010-09-08 10:17:18: Pressure Deviation Fault maurice at snf.stanford.edu
Problem epi2 SNF 2010-10-01 09:26:39: needs testiing after DCS change seymour at snf.stanford.edu
Problem epi2 SNF 2010-10-01 09:26:39: needs testiing after DCS change tberg at snf.stanford.edu
Problem epi2 SNF 2010-10-01 15:01:16: DCS flow deviation 155% filip at snf.stanford.edu
Problem epi2 SNF 2010-10-01 15:01:16: DCS flow deviation 155% maurice at snf.stanford.edu
Problem epi2 SNF 2010-10-09 22:41:40: error occurred junam at snf.stanford.edu
Problem epi2 SNF 2010-10-09 22:41:40: error occurred maurice at snf.stanford.edu
Problem epi2 SNF 2010-10-10 14:22:52: DCS flow deviation error during Ge etch ehe at snf.stanford.edu
Problem epi2 SNF 2010-10-10 14:22:52: DCS flow deviation error during Ge etch tberg at snf.stanford.edu
Problem epi2 SNF 2010-10-11 23:13:29: overpressure errors filip at snf.stanford.edu
Problem epi2 SNF 2010-10-11 23:13:29: overpressure errors tberg at snf.stanford.edu
Problem epi2 SNF 2010-10-12 18:47:18: LLA junam at snf.stanford.edu
Problem epi2 SNF 2010-10-12 18:47:18: LLA maurice at snf.stanford.edu
Problem epi2 SNF 2010-10-12 23:10:55: Overpressure error narii at snf.stanford.edu
Problem epi2 SNF 2010-10-12 23:10:55: Overpressure error maurice at snf.stanford.edu
Problem epi2 SNF 2010-10-14 09:54:36: pressure control update maurice at snf.stanford.edu
Problem epi2 SNF 2010-10-14 12:36:29: Wafer Stuck and LLA Door edfei at snf.stanford.edu
Problem epi2 SNF 2010-10-14 12:36:29: Wafer Stuck and LLA Door maurice at snf.stanford.edu
Problem epi2 SNF 2010-10-14 19:02:13: ch A gave a heater contactor off / low water flow error junil at snf.stanford.edu
Problem epi2 SNF 2010-10-14 19:02:13: ch A gave a heater contactor off / low water flow error tberg at snf.stanford.edu
Problem epi2 SNF 2010-10-17 12:33:02: Error while running recipe narii at snf.stanford.edu
Problem epi2 SNF 2010-10-17 12:33:02: Error while running recipe tberg at snf.stanford.edu
Problem epi2 SNF 2010-10-24 09:48:37: Ch A home lift & Pressure error jasonlin at snf.stanford.edu
Problem epi2 SNF 2010-10-24 09:48:37: Ch A home lift & Pressure error tberg at snf.stanford.edu
Problem epi2 SNF 2010-10-26 10:54:11: another PCV failure grahamab at snf.stanford.edu
Problem epi2 SNF 2010-10-29 12:22:22: aborted recipe due to main scrubber fault ehe at snf.stanford.edu
Problem epi2 SNF 2010-10-29 12:22:22: aborted recipe due to main scrubber fault maurice at snf.stanford.edu
Problem epi2 SNF 2010-10-30 11:21:49: ChA main scrubber fault cfchiang at snf.stanford.edu
Shutdown epi2 SNF 2010-10-01 15:57:41: DCS flow deviations - being monitored grahamab at snf.stanford.edu
Shutdown epi2 SNF 2010-10-01 15:57:41: DCS flow deviations - being monitored maurice at snf.stanford.edu
Shutdown epi2 SNF 2010-10-05 14:54:34: Amat Throttle valve test Testing maurice at snf.stanford.edu
Shutdown epi2 SNF 2010-10-05 14:54:34: Amat Throttle valve test Testing tberg at snf.stanford.edu
Shutdown epi2 SNF 2010-10-06 19:40:16: Unable to pump below 1 torr eenriquez at snf.stanford.edu
Shutdown epi2 SNF 2010-10-06 19:40:16: Unable to pump below 1 torr tberg at snf.stanford.edu
Shutdown epi2 SNF 2010-10-18 09:54:51: Can't home PCV maurice at snf.stanford.edu
Shutdown epi2 SNF 2010-10-18 09:54:51: Can't home PCV tberg at snf.stanford.edu
Shutdown epi2 SNF 2010-10-25 10:45:01: wafer lift not reaching home maurice at snf.stanford.edu
Shutdown epi2 SNF 2010-10-25 10:45:01: wafer lift not reaching home tberg at snf.stanford.edu
Shutdown epi2 SNF 2010-10-27 11:56:54: wafer lift in chamber not working grahamab at snf.stanford.edu
Shutdown epi2 SNF 2010-10-27 11:56:54: wafer lift in chamber not working tberg at snf.stanford.edu
Shutdown epi2 SNF 2010-10-27 19:24:09: wafer stuck in chamber A cfchiang at snf.stanford.edu
Shutdown epi2 SNF 2010-10-27 19:24:09: wafer stuck in chamber A maurice at snf.stanford.edu

Last message date: Sat Oct 30 11:21:50 PDT 2010
Archived on: Sun Dec 23 08:52:56 PST 2012

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