Shutdown epi2 SNF 2010-09-03 12:54:39: wafer lost coming out of chamber

grahamab at snf.stanford.edu grahamab at snf.stanford.edu
Fri Sep 3 12:54:40 PDT 2010


appears to be on the blade, but not in the correct position.  tool brought it out of the chamber and then errored.  you can see the wafer through the transfer chamber right outside the main chamber door.  attempts to move it didn't do anything as it doesn't seem to detect the wafer.  




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