Problem epi2 SNF 2010-09-05 14:44:25: DCS flow fluctuating again

grahamab at snf.stanford.edu grahamab at snf.stanford.edu
Sun Sep 5 14:44:26 PDT 2010


Asking for 400sccm, varies from 200-1024 sccm.  DCS flow was apparently fine all day yesterday, but has intermittently been having problems since this past week.  




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