Problem epi2 SNF 2010-09-06 14:57:48: DCS and Dop1

slcheng at snf.stanford.edu slcheng at snf.stanford.edu
Mon Sep 6 14:57:49 PDT 2010


DCS is still not working.
For Dop1,here are the tests i ran.
set         real
(sccm)
15           14.6 (9.2 first and slowly increase to 14.6)
10            9.2
8              9.2 (failed after 30sec)
5               9.2 
1               9.2
In comparison, i tested D-Dop1
set          real
15           14.1 (4.8 first and slowly increase to 14.1)
13           12.1  (same as above)
10            4.8
8              4.8
I would like to know this 9.2 at Dop1 and 4.8 at D-Dop1 are real flow rate or just a flow offset.
In any cases,don't flow Dop1 less than 10sccm.




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