Problem epi2 SNF 2010-09-06 14:57:48: DCS and Dop1

maurice at snf.stanford.edu maurice at snf.stanford.edu
Tue Sep 7 10:36:30 PDT 2010


Hey Szu-lin,
It sounds to me like the 300sccm dopant MFC is working pretty good.
In general, an MFC should be used in the center of its range.  I would not try to optimize a process in the upper or lower 10% of the range.
So I would expect it to work well between 30 and 270.
You were able to get a decent flow  at 10sccm.
Your recommendation of not going below 10 is very good.
-m




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