Problem epi2 SNF 2010-09-03 19:17:28: unstable DCS flow

maurice at snf.stanford.edu maurice at snf.stanford.edu
Tue Sep 7 14:50:31 PDT 2010


Ran DCS at 200sccm and 400sccm...about 5 min for each flow.   It was rock solid at the set point at both flows.




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