Problem epi2 SNF 2010-07-22 16:59:37: Dopant flow off 47sccm
maurice at snf.stanford.edu
maurice at snf.stanford.edu
Tue Sep 7 14:52:18 PDT 2010
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Problem epi2 SNF 2010-09-06 14:57:48: DCS and Dop1
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Comment epi2 SNF 2010-06-21 15:54:47: homed PCV
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calibrated MFC installed...there is no longer a offset
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Problem epi2 SNF 2010-09-06 14:57:48: DCS and Dop1
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Comment epi2 SNF 2010-06-21 15:54:47: homed PCV
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