Comment epi2 SNF 2010-09-03 14:44:30: Pressure fault
maurice at snf.stanford.edu
maurice at snf.stanford.edu
Tue Sep 7 14:53:16 PDT 2010
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Comment epi2 SNF 2010-09-03 14:44:30: Pressure fault
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Problem epi2 SNF 2010-09-03 19:17:28: unstable DCS flow
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Ran several etches without system faulting
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Comment epi2 SNF 2010-09-03 14:44:30: Pressure fault
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Problem epi2 SNF 2010-09-03 19:17:28: unstable DCS flow
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