Problem epi2 SNF 2010-09-08 10:17:18: Pressure Deviation Fault

jasonlin at snf.stanford.edu jasonlin at snf.stanford.edu
Wed Sep 8 10:17:18 PDT 2010


I looked at the fault logs and it seems like there is a pressure deviation warning during each Ge Etch Coat.  After my 3rd wafer had processed (out of 6), the Ge Etch Coat got a pressure deviation warning and then subsequently a fault.
Next user ran a Ge Etch Coat and it completed fine.  Intermittent problem?




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