GeH4 passed leak check-back on line
Ted Berg
tberg at stanford.edu
Wed Sep 15 06:33:13 PDT 2010
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Hello All, GeH4 passed leak check-back on line.
Previous message:
Problem epi2 SNF 2010-08-02 11:59:33: epi chamber A wafer out of pocket
Next message:
Problem epi2 SNF 2010-09-15 20:17:54: Chamber A bulb failed in Inner Upper zone
Messages sorted by:
[ date ]
[ thread ]
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