Problem epi2 SNF 2010-09-15 20:17:54: Chamber A bulb failed in Inner Upper zone
tberg at snf.stanford.edu
tberg at snf.stanford.edu
Thu Sep 16 14:33:32 PDT 2010
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Problem epi2 SNF 2010-09-15 20:17:54: Chamber A bulb failed in Inner Upper zone
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Comment epi2 SNF 2010-09-16 15:11:50: etched/after bulb change
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Replaced lamps4 each upper inner
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Problem epi2 SNF 2010-09-15 20:17:54: Chamber A bulb failed in Inner Upper zone
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Comment epi2 SNF 2010-09-16 15:11:50: etched/after bulb change
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