Comment epi2 SNF 2010-09-16 15:11:50: etched/after bulb change

maurice at snf.stanford.edu maurice at snf.stanford.edu
Thu Sep 16 15:11:50 PDT 2010

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Ran several etches after bulb change...no problems

Previous message: Problem epi2 SNF 2010-09-15 20:17:54: Chamber A bulb failed in Inner Upper zone
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