Shutdown epi2 SNF 2010-09-20 17:19:50:

edfei at edfei at
Mon Sep 20 17:19:50 PDT 2010

system gave the error:  Chamber A main scrubber fault - manual gas flows not allowed.  Now the wafer is stuck in Chamber A and the system will not allow me to move it.

More information about the epi2-pcs mailing list