Shutdown epi2 SNF 2010-09-20 17:19:50:

edfei at snf.stanford.edu edfei at snf.stanford.edu
Mon Sep 20 17:19:50 PDT 2010


system gave the error:  Chamber A main scrubber fault - manual gas flows not allowed.  Now the wafer is stuck in Chamber A and the system will not allow me to move it.




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