Problem epi2 SNF 2010-09-28 09:59:37: ChA goes to Offline state

takashifuse at snf.stanford.edu takashifuse at snf.stanford.edu
Tue Sep 28 09:59:37 PDT 2010


During GeEtchcoat process, error message was appeared.
It was "Chamber A detected abnormal pressure rise from 628 to 731 torr" and process aborted.
I did reset Ch A.




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