Problem epi2 SNF 2010-09-28 10:37:47: Pressure deviation during GE ETCH COAT

takashifuse at snf.stanford.edu takashifuse at snf.stanford.edu
Tue Sep 28 10:37:48 PDT 2010

Previous message: Problem epi2 SNF 2010-09-28 09:59:37: ChA goes to Offline state
Next message: Problem epi2 SNF 2010-09-28 10:37:47: Pressure deviation during GE ETCH COAT
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

After  I reset ChA, I run GE ETCH COAT again.
But same error was happened.
I have reported this to Elmer.

Previous message: Problem epi2 SNF 2010-09-28 09:59:37: ChA goes to Offline state
Next message: Problem epi2 SNF 2010-09-28 10:37:47: Pressure deviation during GE ETCH COAT
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

More information about the epi2-pcs mailing list