Problem epi2 SNF 2010-09-28 10:37:47: Pressure deviation during GE ETCH COAT

takashifuse at snf.stanford.edu takashifuse at snf.stanford.edu
Tue Sep 28 10:37:48 PDT 2010


After  I reset ChA, I run GE ETCH COAT again.
But same error was happened.
I have reported this to Elmer.




More information about the epi2-pcs mailing list