Problem epi2 SNF 2010-09-28 09:59:37: ChA goes to Offline state

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Wed Sep 29 14:16:49 PDT 2010

Previous message: Problem epi2 SNF 2010-09-28 09:59:37: ChA goes to Offline state
Next message: Problem epi2 SNF 2010-09-28 10:37:47: Pressure deviation during GE ETCH COAT
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

Rebuilt the throttle valve.  Ran GE Etch Coat 2X with no problems.

Previous message: Problem epi2 SNF 2010-09-28 09:59:37: ChA goes to Offline state
Next message: Problem epi2 SNF 2010-09-28 10:37:47: Pressure deviation during GE ETCH COAT
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

More information about the epi2-pcs mailing list