September 2010 Archives by author

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Starting: Wed Sep 1 12:30:40 PDT 2010
Ending: Wed Sep 29 14:16:49 PDT 2010
Messages: 45

GEH4 is empty Ted Berg
GeH4 passed leak check-back on line Ted Berg
Comment epi2 SNF 2010-09-17 01:06:16: LL-A problems/resolution bchui at snf.stanford.edu
Problem epi2 SNF 2010-09-02 16:58:57: DCS flow deviated wildly cfchiang at snf.stanford.edu
Problem epi2 SNF 2010-09-03 19:17:28: unstable DCS flow cfchiang at snf.stanford.edu
Problem epi2 SNF 2010-09-12 09:58:05: Isolated state dwnam at snf.stanford.edu
Shutdown epi2 SNF 2010-09-20 17:19:50: edfei at snf.stanford.edu
Shutdown epi2 SNF 2010-09-03 12:54:39: wafer lost coming out of chamber eenriquez at snf.stanford.edu
Comment epi2 SNF 2010-09-03 14:44:30: Pressure fault eenriquez at snf.stanford.edu
Problem epi2 SNF 2010-09-02 16:58:57: DCS flow deviated wildly eenriquez at snf.stanford.edu
Comment epi2 SNF 2010-09-22 16:08:28: Update scrubber fault eenriquez at snf.stanford.edu
Shutdown epi2 SNF 2010-09-20 17:19:50: eenriquez at snf.stanford.edu
Comment epi2 SNF 2010-09-22 16:08:28: Update scrubber fault eenriquez at snf.stanford.edu
Shutdown epi2 SNF 2010-09-28 16:08:24: PCV not controlling eenriquez at snf.stanford.edu
Problem epi2 SNF 2010-09-28 10:37:47: Pressure deviation during GE ETCH COAT eenriquez at snf.stanford.edu
Problem epi2 SNF 2010-09-28 09:59:37: ChA goes to Offline state eenriquez at snf.stanford.edu
Shutdown epi2 SNF 2010-09-03 12:54:39: wafer lost coming out of chamber grahamab at snf.stanford.edu
Problem epi2 SNF 2010-09-05 14:44:25: DCS flow fluctuating again grahamab at snf.stanford.edu
Problem epi2 SNF 2010-09-07 16:42:48: vacuum wand on floor jasonlin at snf.stanford.edu
Problem epi2 SNF 2010-09-08 10:17:18: Pressure Deviation Fault jasonlin at snf.stanford.edu
Problem epi2 SNF 2010-09-12 00:28:25: Process Chamber isolated state junil at snf.stanford.edu
Problem epi2 SNF 2010-09-06 14:57:48: DCS and Dop1 maurice at snf.stanford.edu
Problem epi2 SNF 2010-09-05 14:44:25: DCS flow fluctuating again maurice at snf.stanford.edu
Problem epi2 SNF 2010-09-03 19:17:28: unstable DCS flow maurice at snf.stanford.edu
Problem epi2 SNF 2010-09-01 12:30:39: low pressure for Phosphine bottle maurice at snf.stanford.edu
Problem epi2 SNF 2010-07-22 16:59:37: Dopant flow off 47sccm maurice at snf.stanford.edu
Comment epi2 SNF 2010-06-21 15:54:47: homed PCV maurice at snf.stanford.edu
Comment epi2 SNF 2010-09-03 14:44:30: Pressure fault maurice at snf.stanford.edu
Problem epi2 SNF 2010-09-05 16:39:23: Not only DCS maurice at snf.stanford.edu
Problem epi2 SNF 2010-09-12 09:58:05: Isolated state maurice at snf.stanford.edu
Problem epi2 SNF 2010-09-12 00:28:25: Process Chamber isolated state maurice at snf.stanford.edu
Problem epi2 SNF 2010-08-17 02:29:47: LLA Door cannot be closed maurice at snf.stanford.edu
Problem epi2 SNF 2010-08-02 11:59:33: epi chamber A wafer out of pocket maurice at snf.stanford.edu
Comment epi2 SNF 2010-09-16 15:11:50: etched/after bulb change maurice at snf.stanford.edu
Shutdown epi2 SNF 2010-09-28 16:08:24: PCV not controlling maurice at snf.stanford.edu
Problem epi2 SNF 2010-09-05 16:39:23: Not only DCS narii at snf.stanford.edu
Problem epi2 SNF 2010-09-15 20:17:54: Chamber A bulb failed in Inner Upper zone narii at snf.stanford.edu
Problem epi2 SNF 2010-09-01 12:30:39: low pressure for Phosphine bottle slcheng at snf.stanford.edu
Problem epi2 SNF 2010-09-06 14:57:48: DCS and Dop1 slcheng at snf.stanford.edu
Problem epi2 SNF 2010-09-28 09:59:37: ChA goes to Offline state takashifuse at snf.stanford.edu
Problem epi2 SNF 2010-09-28 10:37:47: Pressure deviation during GE ETCH COAT takashifuse at snf.stanford.edu
Problem epi2 SNF 2010-09-14 09:28:39: GEH4 is empty-being replaced tberg at snf.stanford.edu
Problem epi2 SNF 2010-09-14 09:28:39: GEH4 is empty-being replaced tberg at snf.stanford.edu
Problem epi2 SNF 2010-09-07 16:42:48: vacuum wand on floor tberg at snf.stanford.edu
Problem epi2 SNF 2010-09-15 20:17:54: Chamber A bulb failed in Inner Upper zone tberg at snf.stanford.edu

Last message date: Wed Sep 29 14:16:49 PDT 2010
Archived on: Sun Dec 23 08:52:56 PST 2012

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