From tberg at snf.stanford.edu Fri Apr 1 14:32:54 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 1 Apr 2011 14:32:54 -0700 Subject: Comment epi2 SNF 2011-04-01 14:32:53: Throttle valve cannot home Message-ID: Cleaned throttle valve and homed back to hot idle From maurice at snf.stanford.edu Fri Apr 1 14:59:50 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 1 Apr 2011 14:59:50 -0700 Subject: Problem epi2 SNF 2011-03-22 00:20:11: ChA failed to reach end condition error Message-ID: Etch program modified From maurice at snf.stanford.edu Fri Apr 1 15:00:19 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 1 Apr 2011 15:00:19 -0700 Subject: Problem epi2 SNF 2011-03-11 09:18:24: Sudden rise of pressure Message-ID: PVC cleaned From jasonlin at snf.stanford.edu Sun Apr 3 16:42:41 2011 From: jasonlin at snf.stanford.edu (jasonlin at snf.stanford.edu) Date: Sun, 3 Apr 2011 16:42:41 -0700 Subject: Problem epi2 SNF 2011-04-03 16:42:40: Ch A Bulb failed Message-ID: Chamber A bulb failed in upper outer zone. After Ge Etch coat, when starting my recipe, it gave this error, and then unable to bring it back to Active Idle again. I removed my wafers from LL A but one wafer is stuck in Ch A. From maurice at snf.stanford.edu Mon Apr 4 08:12:51 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 4 Apr 2011 08:12:51 -0700 Subject: Shutdown epi2 SNF 2011-04-04 08:12:51: Ch A bulb fail Message-ID: Jasonlin reported problem...should have been shutdown From maurice at snf.stanford.edu Mon Apr 4 15:55:29 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 4 Apr 2011 15:55:29 -0700 Subject: Shutdown epi2 SNF 2011-04-04 08:12:51: Ch A bulb fail Message-ID: Mike and Elmer replaced four upper lamps From maurice at snf.stanford.edu Mon Apr 4 15:56:24 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 4 Apr 2011 15:56:24 -0700 Subject: Problem epi2 SNF 2011-04-03 16:42:40: Ch A Bulb failed Message-ID: Mike and Elmer replaced four upper lamps From narii at snf.stanford.edu Tue Apr 5 22:11:38 2011 From: narii at snf.stanford.edu (narii at snf.stanford.edu) Date: Tue, 5 Apr 2011 22:11:38 -0700 Subject: Problem epi2 SNF 2011-04-05 22:11:37: Chamber A lift unable to reach process position Message-ID: Error occured while running automatic mode. Seems like there is no problem with manual mode though. From narii at snf.stanford.edu Tue Apr 5 22:23:28 2011 From: narii at snf.stanford.edu (narii at snf.stanford.edu) Date: Tue, 5 Apr 2011 22:23:28 -0700 Subject: Problem epi2 SNF 2011-04-05 22:23:28: Ge etch coat fails also Message-ID: Ch A. lift cannot reach process position at etching step. Ignore previous report that the machine works manually. From maurice at snf.stanford.edu Wed Apr 6 11:52:24 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 6 Apr 2011 11:52:24 -0700 Subject: Problem epi2 SNF 2011-04-05 22:23:28: Ge etch coat fails also Message-ID: Modified etch recipe: susceptor now stays in normal position From maurice at snf.stanford.edu Wed Apr 6 11:52:40 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 6 Apr 2011 11:52:40 -0700 Subject: Problem epi2 SNF 2011-04-05 22:11:37: Chamber A lift unable to reach process position Message-ID: Modified etch recipe: susceptor now stays in normal position From maurice at snf.stanford.edu Wed Apr 6 11:56:49 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 6 Apr 2011 11:56:49 -0700 Subject: Comment epi2 SNF 2011-03-18 01:12:28: Ge Etch Coat Pressure Error Message-ID: etch recipe modified: etch pressure reduced from 600 mtorr to 450; pressure should be more stable at this pressure. From maurice at snf.stanford.edu Wed Apr 6 11:57:06 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 6 Apr 2011 11:57:06 -0700 Subject: Comment epi2 SNF 2011-03-18 00:05:12: Ge Etch Coat Pressure Error Message-ID: etch recipe modified: etch pressure reduced from 600 mtorr to 450; pressure should be more stable at this pressure. From maurice at snf.stanford.edu Wed Apr 6 11:57:14 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 6 Apr 2011 11:57:14 -0700 Subject: Comment epi2 SNF 2011-03-18 10:37:27: had another overpressure error last night Message-ID: etch recipe modified: etch pressure reduced from 600 mtorr to 450; pressure should be more stable at this pressure. From maurice at snf.stanford.edu Wed Apr 6 11:57:28 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 6 Apr 2011 11:57:28 -0700 Subject: Comment epi2 SNF 2011-03-21 09:25:19: removed wafer from transfer chamber Message-ID: logged From maurice at snf.stanford.edu Wed Apr 6 11:58:05 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 6 Apr 2011 11:58:05 -0700 Subject: Comment epi2 SNF 2011-03-22 11:25:55: Ge etch recipe pressure 450torr Message-ID: logged From edfei at snf.stanford.edu Wed Apr 6 17:28:58 2011 From: edfei at snf.stanford.edu (edfei at snf.stanford.edu) Date: Wed, 6 Apr 2011 17:28:58 -0700 Subject: Problem epi2 SNF 2011-04-06 17:28:57: Wafer reading errors in LLA slot 12+ Message-ID: LLA has difficulty reading wafers from slot 12 and higher. The wafers will either not be detected automatically or give a critical fault in the transfer chamber "not centered". moving the wafers to lower number slots seems to work. From ehe at snf.stanford.edu Wed Apr 6 20:07:15 2011 From: ehe at snf.stanford.edu (ehe at snf.stanford.edu) Date: Wed, 6 Apr 2011 20:07:15 -0700 Subject: Problem epi2 SNF 2011-04-06 20:07:15: silane 6% deviation error Message-ID: Wish I could say for sure on which step - definitely during recipe and not during etch though. From maurice at snf.stanford.edu Fri Apr 8 17:37:28 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 8 Apr 2011 17:37:28 -0700 Subject: Problem epi2 SNF 2011-04-06 17:28:57: Wafer reading errors in LLA slot 12+ Message-ID: was not able to repeat the error but we will continue to watch for it. If is a problem we will ask FS to come in an cal it From narii at snf.stanford.edu Sun Apr 10 15:27:25 2011 From: narii at snf.stanford.edu (narii at snf.stanford.edu) Date: Sun, 10 Apr 2011 15:27:25 -0700 Subject: Problem epi2 SNF 2011-04-10 15:27:24: DCS problem Message-ID: During Etch coat step, DCS shots up over 1000sccm and recipe stops. Tried a couple of times but couldn't complete coat recipe From ehe at snf.stanford.edu Sun Apr 10 19:05:23 2011 From: ehe at snf.stanford.edu (ehe at snf.stanford.edu) Date: Sun, 10 Apr 2011 19:05:23 -0700 Subject: Problem epi2 SNF 2011-04-10 19:05:22: DCS flow rate uncontrollable Message-ID: Tried etch recipe 5 times. Tried flowing DCS to vent from gas panel. Could not control flow rate at any flow setting. MFC problem? From ehe at snf.stanford.edu Sun Apr 10 21:46:09 2011 From: ehe at snf.stanford.edu (ehe at snf.stanford.edu) Date: Sun, 10 Apr 2011 21:46:09 -0700 Subject: Problem epi2 SNF 2011-04-10 21:46:08: error messages Message-ID: chA heater contacter off, low water flow errors during hot idle From tberg at snf.stanford.edu Mon Apr 11 06:23:03 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 11 Apr 2011 06:23:03 -0700 Subject: Problem epi2 SNF 2011-04-10 21:46:08: error messages Message-ID: From seymour at snf.stanford.edu Mon Apr 11 07:58:11 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 11 Apr 2011 07:58:11 -0700 Subject: Shutdown epi2 SNF 2011-04-11 07:58:11: HCL tank needs to be changed Message-ID: From tberg at snf.stanford.edu Mon Apr 11 10:30:45 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 11 Apr 2011 10:30:45 -0700 Subject: Comment epi2 SNF 2011-04-01 14:32:53: Throttle valve cannot home Message-ID: Cleaned and tested From tberg at snf.stanford.edu Mon Apr 11 10:30:58 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 11 Apr 2011 10:30:58 -0700 Subject: Comment epi2 SNF 2011-03-31 07:51:44: cleaned scrubber and burnbox inlets Message-ID: noted From tberg at snf.stanford.edu Mon Apr 11 10:31:33 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 11 Apr 2011 10:31:33 -0700 Subject: Comment epi2 SNF 2011-04-11 10:31:33: HCL cylinder changed in leak check Message-ID: From seymour at snf.stanford.edu Mon Apr 11 13:34:05 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 11 Apr 2011 13:34:05 -0700 Subject: Shutdown epi2 SNF 2011-04-11 07:58:11: HCL tank needs to be changed Message-ID: HCL cylinder replaced and leak check passed. From tberg at snf.stanford.edu Mon Apr 11 13:35:16 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 11 Apr 2011 13:35:16 -0700 Subject: Problem epi2 SNF 2011-04-10 15:27:24: DCS problem Message-ID: DCS temp controller temp too high, brought it down to 18.5 DCS looked fairly stable From maurice at snf.stanford.edu Mon Apr 11 15:13:45 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 11 Apr 2011 15:13:45 -0700 Subject: Shutdown epi2 SNF 2011-04-11 15:13:44: DCS unstable Message-ID: From maurice at snf.stanford.edu Tue Apr 12 14:41:31 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 12 Apr 2011 14:41:31 -0700 Subject: Shutdown epi2 SNF 2011-04-11 15:13:44: DCS unstable Message-ID: DCS still down...but new etch/coat recipes written that uses silane instead of DCS - Ge Etch coat-Si Etchcoat-cha-Si From maurice at snf.stanford.edu Tue Apr 12 14:43:11 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 12 Apr 2011 14:43:11 -0700 Subject: Problem epi2 SNF 2011-04-12 14:43:11: No DCS Message-ID: DCS still down...but new etch/coat recipes written that uses silane instead of DCS - If your recipes don't require DCS then the tool is usable for use. - Ge Etch coat-Si Etchcoat-cha-Si From zpatel at snf.stanford.edu Wed Apr 13 13:53:08 2011 From: zpatel at snf.stanford.edu (zpatel at snf.stanford.edu) Date: Wed, 13 Apr 2011 13:53:08 -0700 Subject: Problem epi2 SNF 2011-04-13 13:53:07: No PH3 gas Message-ID: the flow meter for PH3 gas is reading zero From tberg at snf.stanford.edu Wed Apr 13 15:15:59 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 13 Apr 2011 15:15:59 -0700 Subject: Comment epi2 SNF 2011-04-13 15:15:58: PH3 cylinder is empty Message-ID: From shott at snf.stanford.edu Wed Apr 13 15:42:36 2011 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Wed, 13 Apr 2011 15:42:36 -0700 Subject: Problem epi2 SNF 2011-04-12 14:43:11: No DCS Message-ID: DCS has been pumped out and restored to service following rebuild of the "upstairs" burn box. Thanks to Mike Dickey, Ted Berg, Ray Seymour, Mary Tang, and Maurice Stevens for important contributions to the project. John From maurice at snf.stanford.edu Wed Apr 13 16:06:05 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 13 Apr 2011 16:06:05 -0700 Subject: Problem epi2 SNF 2011-04-06 20:07:15: silane 6% deviation error Message-ID: We have seen no Silane issue. May have been an issue with the recipe (using a flow too low) From tberg at snf.stanford.edu Thu Apr 14 06:15:19 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 14 Apr 2011 06:15:19 -0700 Subject: Comment epi2 SNF 2011-04-14 06:15:19: PH3 Cylinder has been on order Message-ID: Cylinder has been on order since March Trying to expedite From maurice at snf.stanford.edu Thu Apr 14 11:25:09 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 14 Apr 2011 11:25:09 -0700 Subject: Problem epi2 SNF 2011-04-10 19:05:22: DCS flow rate uncontrollable Message-ID: Both Zubin and Cathy report that the DCS is flowing normal after the line was sucked out and backfilled From fungus at snf.stanford.edu Thu Apr 14 14:04:01 2011 From: fungus at snf.stanford.edu (fungus at snf.stanford.edu) Date: Thu, 14 Apr 2011 14:04:01 -0700 Subject: Comment epi2 SNF 2011-04-14 14:04:00: SiH4 6% deviation Message-ID: 6% deviation on SiH4 From tberg at snf.stanford.edu Fri Apr 15 06:13:32 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 15 Apr 2011 06:13:32 -0700 Subject: Comment epi2 SNF 2011-04-11 10:31:33: HCL cylinder changed in leak check Message-ID: completed earlier this week From junil at snf.stanford.edu Sun Apr 17 08:15:26 2011 From: junil at snf.stanford.edu (junil at snf.stanford.edu) Date: Sun, 17 Apr 2011 08:15:26 -0700 Subject: Problem epi2 SNF 2011-04-17 08:15:26: isolated state due to DP2 error Message-ID: Found chamber in isolated state due to DP2 error during previous user's process. Was not able to recover it to inert idle. From tberg at snf.stanford.edu Mon Apr 18 06:30:03 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 18 Apr 2011 06:30:03 -0700 Subject: Problem epi2 SNF 2011-04-17 08:15:26: isolated state due to DP2 error Message-ID: Reset system moved wafer to LLa reminder ther is no PH3 From tberg at snf.stanford.edu Mon Apr 18 09:42:02 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 18 Apr 2011 09:42:02 -0700 Subject: Comment epi2 SNF 2011-03-31 08:29:54: ran geetch coat Message-ID: noted From tberg at snf.stanford.edu Mon Apr 18 09:42:20 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 18 Apr 2011 09:42:20 -0700 Subject: Comment epi2 SNF 2011-03-30 09:38:03: Dome inspected/ clear Message-ID: noted From tberg at snf.stanford.edu Mon Apr 18 09:43:10 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 18 Apr 2011 09:43:10 -0700 Subject: Comment epi2 SNF 2011-03-25 07:50:11: Ready for test Message-ID: back to users From tberg at snf.stanford.edu Tue Apr 19 10:24:08 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 19 Apr 2011 10:24:08 -0700 Subject: Comment epi2 SNF 2011-04-19 10:24:07: B2H6 1% and GeH4 cylinders Changed Message-ID: B2H6 1% and GeH4 cylinders Changed in leak test now From tberg at snf.stanford.edu Tue Apr 19 10:25:17 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 19 Apr 2011 10:25:17 -0700 Subject: Problem epi2 SNF 2011-04-19 10:25:17: B2H6 1% and GeH4 cylinders Changed Message-ID: B2H6 1% and GeH4 cylinders Changed in leak test now From maurice at snf.stanford.edu Tue Apr 19 10:32:40 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 19 Apr 2011 10:32:40 -0700 Subject: Comment epi2 SNF 2011-04-19 10:32:39: dome inspected...clear Message-ID: From tberg at snf.stanford.edu Wed Apr 20 07:24:41 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 20 Apr 2011 07:24:41 -0700 Subject: Comment epi2 SNF 2011-04-19 10:24:07: B2H6 1% and GeH4 cylinders Changed Message-ID: Both cylinders look good after the night. Germane is back on. B2H6 should be on shortly. From tberg at snf.stanford.edu Wed Apr 20 10:49:18 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 20 Apr 2011 10:49:18 -0700 Subject: Comment epi2 SNF 2011-04-20 10:49:18: Cleaned Guardian and checked scrubber Message-ID: From tberg at snf.stanford.edu Wed Apr 20 10:50:09 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 20 Apr 2011 10:50:09 -0700 Subject: Problem epi2 SNF 2011-04-19 10:25:17: B2H6 1% and GeH4 cylinders Changed Message-ID: Both cylinders are back on line after change and leak check From fungus at snf.stanford.edu Thu Apr 21 15:22:27 2011 From: fungus at snf.stanford.edu (fungus at snf.stanford.edu) Date: Thu, 21 Apr 2011 15:22:27 -0700 Subject: Comment epi2 SNF 2011-04-21 15:22:27: enable light broken Message-ID: From tberg at snf.stanford.edu Fri Apr 22 13:50:47 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 22 Apr 2011 13:50:47 -0700 Subject: Comment epi2 SNF 2011-04-21 15:22:27: enable light broken Message-ID: enable light unbroken From seymour at snf.stanford.edu Mon Apr 25 07:29:58 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 25 Apr 2011 07:29:58 -0700 Subject: Problem epi2 SNF 2011-04-13 13:53:07: No PH3 gas Message-ID: Cylinder arrived. The cylinder was placed on leak check which it passed. The Phosphine is ready to use. From seymour at snf.stanford.edu Mon Apr 25 07:30:27 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 25 Apr 2011 07:30:27 -0700 Subject: Comment epi2 SNF 2011-04-13 15:15:58: PH3 cylinder is empty Message-ID: new cylinder installed and leak checked From seymour at snf.stanford.edu Mon Apr 25 07:30:53 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 25 Apr 2011 07:30:53 -0700 Subject: Comment epi2 SNF 2011-04-14 06:15:19: PH3 Cylinder has been on order Message-ID: cylinder arrived and passed leak check. From fungus at snf.stanford.edu Mon Apr 25 10:41:00 2011 From: fungus at snf.stanford.edu (fungus at snf.stanford.edu) Date: Mon, 25 Apr 2011 10:41:00 -0700 Subject: Shutdown epi2 SNF 2011-04-25 10:40:59: cha bulb failed Message-ID: upper inner zone bulb fail From tberg at snf.stanford.edu Mon Apr 25 11:54:07 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 25 Apr 2011 11:54:07 -0700 Subject: Shutdown epi2 SNF 2011-04-25 10:40:59: cha bulb failed Message-ID: Replaced 4 bad lamps in upper zone bring back up to hot idle From tberg at snf.stanford.edu Mon Apr 25 13:13:11 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 25 Apr 2011 13:13:11 -0700 Subject: Comment epi2 SNF 2011-04-20 10:49:18: Cleaned Guardian and checked scrubber Message-ID: noted From tberg at snf.stanford.edu Tue Apr 26 06:48:21 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 26 Apr 2011 06:48:21 -0700 Subject: Shutdown epi2 SNF 2011-04-26 06:48:21: no HCL Message-ID: Changing cylinder From maurice at snf.stanford.edu Tue Apr 26 14:35:31 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 26 Apr 2011 14:35:31 -0700 Subject: Shutdown epi2 SNF 2011-04-26 06:48:21: no HCL Message-ID: Bottle changed and leak checked ok. - GeEtchcoat completed - System up From fungus at snf.stanford.edu Wed Apr 27 22:44:17 2011 From: fungus at snf.stanford.edu (fungus at snf.stanford.edu) Date: Wed, 27 Apr 2011 22:44:17 -0700 Subject: Problem epi2 SNF 2011-04-27 22:44:16: Unable to Etch Chamber Message-ID: Ge etch coat FAILS because of not reaching temperature (only reaches 1130C not 1190C) Mo etch FAILS because 100% HCl dev. HCl only max at 99sccm when setpoint is 400sccm Etchcoat cha FAILS because 100% HCl dev. From tberg at snf.stanford.edu Thu Apr 28 06:42:50 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 28 Apr 2011 06:42:50 -0700 Subject: Shutdown epi2 SNF 2011-04-28 06:42:50: Ge Etch fail Message-ID: From maurice at snf.stanford.edu Thu Apr 28 09:26:23 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 28 Apr 2011 09:26:23 -0700 Subject: Comment epi2 SNF 2011-04-28 09:26:22: dome coated Message-ID: running constant power etch From maurice at snf.stanford.edu Thu Apr 28 16:13:26 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 28 Apr 2011 16:13:26 -0700 Subject: Shutdown epi2 SNF 2011-04-28 06:42:50: Ge Etch fail Message-ID: Ge etch failed because it fail to reach temp in step 6 of program. - Inspected dome and found it coat. - Ran several constant power etches but HCl pressure dropped. (The last etch run in the system suscessfully probably had a low HCl flow after the initial flow check and didn't clean the chamber). We manually ran HCl through the chamber and verified the drop in HCl flow. - Ted evacuated HCl line to back to the gas cabinet and flowed N2 for .5 hour. He recharged line with HCl. Manually flowed to verify HCl pressure was stable. - We ran several etches and the HCl pressure stayed constant and the temp in the chamber got back to normal (indicating the coating was etching off the chamber). - We inspected the dome and say only minor coating. Ran one more etch to clean it up. From fungus at snf.stanford.edu Thu Apr 28 17:40:30 2011 From: fungus at snf.stanford.edu (fungus at snf.stanford.edu) Date: Thu, 28 Apr 2011 17:40:30 -0700 Subject: Problem epi2 SNF 2011-04-28 17:40:29: FAULT HCL deviation 100% Message-ID: From fungus at snf.stanford.edu Thu Apr 28 20:42:44 2011 From: fungus at snf.stanford.edu (fungus at snf.stanford.edu) Date: Thu, 28 Apr 2011 20:42:44 -0700 Subject: Comment epi2 SNF 2011-04-28 20:42:43: Message-ID: From fungus at snf.stanford.edu Thu Apr 28 20:45:08 2011 From: fungus at snf.stanford.edu (fungus at snf.stanford.edu) Date: Thu, 28 Apr 2011 20:45:08 -0700 Subject: Comment epi2 SNF 2011-04-28 20:45:07: HCl MFC line error Message-ID: (continue from earlier comment) GE ETCH COAT seems ok while ETCH COAT CHA is NOT. So the HCl bypass line so far is ok for Ge Etch Coat but etches requiring HCl MFC lines at 980, starts out ok for first 10 sec then the line flow drops and ETCHCOAT CHA errors out. From fungus at snf.stanford.edu Fri Apr 29 11:41:10 2011 From: fungus at snf.stanford.edu (fungus at snf.stanford.edu) Date: Fri, 29 Apr 2011 11:41:10 -0700 Subject: Problem epi2 SNF 2011-04-29 11:41:09: HCL deviation by 70 % during standard etch recipe Message-ID: HCL deviation by 70 % during standard etch recipe From zpatel at snf.stanford.edu Fri Apr 29 13:43:33 2011 From: zpatel at snf.stanford.edu (zpatel at snf.stanford.edu) Date: Fri, 29 Apr 2011 13:43:33 -0700 Subject: Shutdown epi2 SNF 2011-04-29 13:43:32: No HCL flow Message-ID: Cannot run any etch program