Problem epi2 SNF 2011-04-03 16:42:40: Ch A Bulb failed

jasonlin at snf.stanford.edu jasonlin at snf.stanford.edu
Sun Apr 3 16:42:41 PDT 2011


Chamber A bulb failed in upper outer zone.
After Ge Etch coat, when starting my recipe, it gave this error, and then unable to bring it back to Active Idle again.  I removed my wafers from LL A but one wafer is stuck in Ch A.




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