Shutdown epi2 SNF 2011-04-04 08:12:51: Ch A bulb fail
maurice at snf.stanford.edu
maurice at snf.stanford.edu
Mon Apr 4 15:55:29 PDT 2011
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Shutdown epi2 SNF 2011-04-04 08:12:51: Ch A bulb fail
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Problem epi2 SNF 2011-04-05 22:11:37: Chamber A lift unable to reach process position
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Mike and Elmer replaced four upper lamps
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Shutdown epi2 SNF 2011-04-04 08:12:51: Ch A bulb fail
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Problem epi2 SNF 2011-04-05 22:11:37: Chamber A lift unable to reach process position
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