Comment epi2 SNF 2011-03-18 01:12:28: Ge Etch Coat Pressure Error

maurice at snf.stanford.edu maurice at snf.stanford.edu
Wed Apr 6 11:56:49 PDT 2011

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etch recipe modified:  etch pressure reduced from 600 mtorr to 450; pressure should be more stable at this pressure.

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