Comment epi2 SNF 2011-03-22 11:25:55: Ge etch recipe pressure 450torr
maurice at snf.stanford.edu
maurice at snf.stanford.edu
Wed Apr 6 11:58:05 PDT 2011
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Comment epi2 SNF 2011-03-21 09:25:19: removed wafer from transfer chamber
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Problem epi2 SNF 2011-04-06 17:28:57: Wafer reading errors in LLA slot 12+
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Comment epi2 SNF 2011-03-21 09:25:19: removed wafer from transfer chamber
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