Problem epi2 SNF 2011-04-06 17:28:57: Wafer reading errors in LLA slot 12+

edfei at snf.stanford.edu edfei at snf.stanford.edu
Wed Apr 6 17:28:58 PDT 2011


LLA has difficulty reading wafers from slot 12 and higher.  The wafers will either not be detected automatically or give a critical fault in the transfer chamber "not centered".  moving the wafers to lower number slots seems to work.




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