Problem epi2 SNF 2011-04-10 19:05:22: DCS flow rate uncontrollable

ehe at snf.stanford.edu ehe at snf.stanford.edu
Sun Apr 10 19:05:23 PDT 2011


Tried etch recipe 5 times. Tried flowing DCS to vent from gas panel. Could not control flow rate at any flow setting. MFC problem?




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