Shutdown epi2 SNF 2011-04-11 15:13:44: DCS unstable

maurice at snf.stanford.edu maurice at snf.stanford.edu
Tue Apr 12 14:41:31 PDT 2011


DCS still down...but new etch/coat recipes written that uses silane instead of DCS
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Ge Etch coat-Si
Etchcoat-cha-Si




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