Problem epi2 SNF 2011-04-12 14:43:11: No DCS

maurice at maurice at
Tue Apr 12 14:43:11 PDT 2011

DCS still down...but new etch/coat recipes written that uses silane instead of DCS
If your recipes don't require DCS then the tool is usable for use.
Ge Etch coat-Si

More information about the epi2-pcs mailing list