Problem epi2 SNF 2011-04-12 14:43:11: No DCS

maurice at snf.stanford.edu maurice at snf.stanford.edu
Tue Apr 12 14:43:11 PDT 2011


DCS still down...but new etch/coat recipes written that uses silane instead of DCS
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If your recipes don't require DCS then the tool is usable for use.
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Ge Etch coat-Si
Etchcoat-cha-Si




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