Problem epi2 SNF 2011-04-27 22:44:16: Unable to Etch Chamber

fungus at snf.stanford.edu fungus at snf.stanford.edu
Wed Apr 27 22:44:17 PDT 2011


Ge etch coat FAILS because of not reaching temperature (only reaches 1130C not 1190C)
Mo etch FAILS because 100% HCl dev.  HCl only max at 99sccm when setpoint is 400sccm
Etchcoat cha FAILS because 100% HCl dev.




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