Comment epi2 SNF 2011-04-28 20:45:07: HCl MFC line error

fungus at snf.stanford.edu fungus at snf.stanford.edu
Thu Apr 28 20:45:08 PDT 2011


(continue from earlier comment) GE ETCH COAT seems ok while ETCH COAT CHA is NOT. 
So the HCl bypass line so far is ok for Ge Etch Coat but etches requiring HCl MFC lines at 980, starts out ok for first 10 sec then the line flow drops and ETCHCOAT CHA errors out. 




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