Shutdown epi2 SNF 2011-04-29 13:43:32: No HCL flow
zpatel at snf.stanford.edu
zpatel at snf.stanford.edu
Fri Apr 29 13:43:33 PDT 2011
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Problem epi2 SNF 2011-04-29 11:41:09: HCL deviation by 70 % during standard etch recipe
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Cannot run any etch program
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Problem epi2 SNF 2011-04-29 11:41:09: HCL deviation by 70 % during standard etch recipe
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