April 2011 Archives by date

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Starting: Fri Apr 1 14:32:54 PDT 2011
Ending: Fri Apr 29 13:43:33 PDT 2011
Messages: 70

Comment epi2 SNF 2011-04-01 14:32:53: Throttle valve cannot home tberg at snf.stanford.edu
Problem epi2 SNF 2011-03-22 00:20:11: ChA failed to reach end condition error maurice at snf.stanford.edu
Problem epi2 SNF 2011-03-11 09:18:24: Sudden rise of pressure maurice at snf.stanford.edu
Problem epi2 SNF 2011-04-03 16:42:40: Ch A Bulb failed jasonlin at snf.stanford.edu
Shutdown epi2 SNF 2011-04-04 08:12:51: Ch A bulb fail maurice at snf.stanford.edu
Shutdown epi2 SNF 2011-04-04 08:12:51: Ch A bulb fail maurice at snf.stanford.edu
Problem epi2 SNF 2011-04-03 16:42:40: Ch A Bulb failed maurice at snf.stanford.edu
Problem epi2 SNF 2011-04-05 22:11:37: Chamber A lift unable to reach process position narii at snf.stanford.edu
Problem epi2 SNF 2011-04-05 22:23:28: Ge etch coat fails also narii at snf.stanford.edu
Problem epi2 SNF 2011-04-05 22:23:28: Ge etch coat fails also maurice at snf.stanford.edu
Problem epi2 SNF 2011-04-05 22:11:37: Chamber A lift unable to reach process position maurice at snf.stanford.edu
Comment epi2 SNF 2011-03-18 01:12:28: Ge Etch Coat Pressure Error maurice at snf.stanford.edu
Comment epi2 SNF 2011-03-18 00:05:12: Ge Etch Coat Pressure Error maurice at snf.stanford.edu
Comment epi2 SNF 2011-03-18 10:37:27: had another overpressure error last night maurice at snf.stanford.edu
Comment epi2 SNF 2011-03-21 09:25:19: removed wafer from transfer chamber maurice at snf.stanford.edu
Comment epi2 SNF 2011-03-22 11:25:55: Ge etch recipe pressure 450torr maurice at snf.stanford.edu
Problem epi2 SNF 2011-04-06 17:28:57: Wafer reading errors in LLA slot 12+ edfei at snf.stanford.edu
Problem epi2 SNF 2011-04-06 20:07:15: silane 6% deviation error ehe at snf.stanford.edu
Problem epi2 SNF 2011-04-06 17:28:57: Wafer reading errors in LLA slot 12+ maurice at snf.stanford.edu
Problem epi2 SNF 2011-04-10 15:27:24: DCS problem narii at snf.stanford.edu
Problem epi2 SNF 2011-04-10 19:05:22: DCS flow rate uncontrollable ehe at snf.stanford.edu
Problem epi2 SNF 2011-04-10 21:46:08: error messages ehe at snf.stanford.edu
Problem epi2 SNF 2011-04-10 21:46:08: error messages tberg at snf.stanford.edu
Shutdown epi2 SNF 2011-04-11 07:58:11: HCL tank needs to be changed seymour at snf.stanford.edu
Comment epi2 SNF 2011-04-01 14:32:53: Throttle valve cannot home tberg at snf.stanford.edu
Comment epi2 SNF 2011-03-31 07:51:44: cleaned scrubber and burnbox inlets tberg at snf.stanford.edu
Comment epi2 SNF 2011-04-11 10:31:33: HCL cylinder changed in leak check tberg at snf.stanford.edu
Shutdown epi2 SNF 2011-04-11 07:58:11: HCL tank needs to be changed seymour at snf.stanford.edu
Problem epi2 SNF 2011-04-10 15:27:24: DCS problem tberg at snf.stanford.edu
Shutdown epi2 SNF 2011-04-11 15:13:44: DCS unstable maurice at snf.stanford.edu
Shutdown epi2 SNF 2011-04-11 15:13:44: DCS unstable maurice at snf.stanford.edu
Problem epi2 SNF 2011-04-12 14:43:11: No DCS maurice at snf.stanford.edu
Problem epi2 SNF 2011-04-13 13:53:07: No PH3 gas zpatel at snf.stanford.edu
Comment epi2 SNF 2011-04-13 15:15:58: PH3 cylinder is empty tberg at snf.stanford.edu
Problem epi2 SNF 2011-04-12 14:43:11: No DCS shott at snf.stanford.edu
Problem epi2 SNF 2011-04-06 20:07:15: silane 6% deviation error maurice at snf.stanford.edu
Comment epi2 SNF 2011-04-14 06:15:19: PH3 Cylinder has been on order tberg at snf.stanford.edu
Problem epi2 SNF 2011-04-10 19:05:22: DCS flow rate uncontrollable maurice at snf.stanford.edu
Comment epi2 SNF 2011-04-14 14:04:00: SiH4 6% deviation fungus at snf.stanford.edu
Comment epi2 SNF 2011-04-11 10:31:33: HCL cylinder changed in leak check tberg at snf.stanford.edu
Problem epi2 SNF 2011-04-17 08:15:26: isolated state due to DP2 error junil at snf.stanford.edu
Problem epi2 SNF 2011-04-17 08:15:26: isolated state due to DP2 error tberg at snf.stanford.edu
Comment epi2 SNF 2011-03-31 08:29:54: ran geetch coat tberg at snf.stanford.edu
Comment epi2 SNF 2011-03-30 09:38:03: Dome inspected/ clear tberg at snf.stanford.edu
Comment epi2 SNF 2011-03-25 07:50:11: Ready for test tberg at snf.stanford.edu
Comment epi2 SNF 2011-04-19 10:24:07: B2H6 1% and GeH4 cylinders Changed tberg at snf.stanford.edu
Problem epi2 SNF 2011-04-19 10:25:17: B2H6 1% and GeH4 cylinders Changed tberg at snf.stanford.edu
Comment epi2 SNF 2011-04-19 10:32:39: dome inspected...clear maurice at snf.stanford.edu
Comment epi2 SNF 2011-04-19 10:24:07: B2H6 1% and GeH4 cylinders Changed tberg at snf.stanford.edu
Comment epi2 SNF 2011-04-20 10:49:18: Cleaned Guardian and checked scrubber tberg at snf.stanford.edu
Problem epi2 SNF 2011-04-19 10:25:17: B2H6 1% and GeH4 cylinders Changed tberg at snf.stanford.edu
Comment epi2 SNF 2011-04-21 15:22:27: enable light broken fungus at snf.stanford.edu
Comment epi2 SNF 2011-04-21 15:22:27: enable light broken tberg at snf.stanford.edu
Problem epi2 SNF 2011-04-13 13:53:07: No PH3 gas seymour at snf.stanford.edu
Comment epi2 SNF 2011-04-13 15:15:58: PH3 cylinder is empty seymour at snf.stanford.edu
Comment epi2 SNF 2011-04-14 06:15:19: PH3 Cylinder has been on order seymour at snf.stanford.edu
Shutdown epi2 SNF 2011-04-25 10:40:59: cha bulb failed fungus at snf.stanford.edu
Shutdown epi2 SNF 2011-04-25 10:40:59: cha bulb failed tberg at snf.stanford.edu
Comment epi2 SNF 2011-04-20 10:49:18: Cleaned Guardian and checked scrubber tberg at snf.stanford.edu
Shutdown epi2 SNF 2011-04-26 06:48:21: no HCL tberg at snf.stanford.edu
Shutdown epi2 SNF 2011-04-26 06:48:21: no HCL maurice at snf.stanford.edu
Problem epi2 SNF 2011-04-27 22:44:16: Unable to Etch Chamber fungus at snf.stanford.edu
Shutdown epi2 SNF 2011-04-28 06:42:50: Ge Etch fail tberg at snf.stanford.edu
Comment epi2 SNF 2011-04-28 09:26:22: dome coated maurice at snf.stanford.edu
Shutdown epi2 SNF 2011-04-28 06:42:50: Ge Etch fail maurice at snf.stanford.edu
Problem epi2 SNF 2011-04-28 17:40:29: FAULT HCL deviation 100% fungus at snf.stanford.edu
Comment epi2 SNF 2011-04-28 20:42:43: fungus at snf.stanford.edu
Comment epi2 SNF 2011-04-28 20:45:07: HCl MFC line error fungus at snf.stanford.edu
Problem epi2 SNF 2011-04-29 11:41:09: HCL deviation by 70 % during standard etch recipe fungus at snf.stanford.edu
Shutdown epi2 SNF 2011-04-29 13:43:32: No HCL flow zpatel at snf.stanford.edu

Last message date: Fri Apr 29 13:43:33 PDT 2011
Archived on: Sun Dec 23 08:52:58 PST 2012

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