From tberg at snf.stanford.edu Mon Aug 1 05:58:38 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 1 Aug 2011 05:58:38 -0700 Subject: Problem epi2 SNF 2011-08-01 05:58:37: GeH4 is Empty Message-ID: GeH4 is Empty will be changing the cylinder. From tberg at snf.stanford.edu Mon Aug 1 06:57:43 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 1 Aug 2011 06:57:43 -0700 Subject: Comment epi2 SNF 2011-08-01 06:57:43: GeH4 is changed and in leak check Message-ID: GeH4 is changed and in leak check From tberg at snf.stanford.edu Mon Aug 1 11:19:59 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 1 Aug 2011 11:19:59 -0700 Subject: Comment epi2 SNF 2011-08-01 11:19:59: Message-ID: From tberg at snf.stanford.edu Mon Aug 1 11:20:32 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 1 Aug 2011 11:20:32 -0700 Subject: Comment epi2 SNF 2011-08-01 06:57:43: GeH4 is changed and in leak check Message-ID: GeH4 is back on line From tberg at snf.stanford.edu Mon Aug 1 11:21:01 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 1 Aug 2011 11:21:01 -0700 Subject: Comment epi2 SNF 2011-08-01 11:19:59: Message-ID: GeH4 is back on line, leak check good From tberg at snf.stanford.edu Mon Aug 1 11:21:15 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 1 Aug 2011 11:21:15 -0700 Subject: Problem epi2 SNF 2011-08-01 05:58:37: GeH4 is Empty Message-ID: GeH4 is back on line From zpatel at snf.stanford.edu Mon Aug 1 12:18:21 2011 From: zpatel at snf.stanford.edu (zpatel at snf.stanford.edu) Date: Mon, 1 Aug 2011 12:18:21 -0700 Subject: Comment epi2 SNF 2011-08-01 12:18:21: LLA and LLB cassette were interchanged Message-ID: Please do not interchange LLA abd LLB cassette From zpatel at snf.stanford.edu Mon Aug 1 18:11:37 2011 From: zpatel at snf.stanford.edu (zpatel at snf.stanford.edu) Date: Mon, 1 Aug 2011 18:11:37 -0700 Subject: Comment epi2 SNF 2011-08-01 18:11:36: LLA not venting to atm Message-ID: From tberg at snf.stanford.edu Tue Aug 2 07:10:49 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 2 Aug 2011 07:10:49 -0700 Subject: Comment epi2 SNF 2011-08-01 12:18:21: LLA and LLB cassette were interchanged Message-ID: cassettes back to original locations From tberg at snf.stanford.edu Tue Aug 2 07:11:30 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 2 Aug 2011 07:11:30 -0700 Subject: Comment epi2 SNF 2011-08-01 18:11:36: LLA not venting to atm Message-ID: LLa vented and cassettes exchanged to original positions From zpatel at snf.stanford.edu Wed Aug 3 15:06:22 2011 From: zpatel at snf.stanford.edu (zpatel at snf.stanford.edu) Date: Wed, 3 Aug 2011 15:06:22 -0700 Subject: Shutdown epi2 SNF 2011-08-03 15:06:21: Wafer lost in chamber P9 Message-ID: Transfering the wafer from LLA to LLB went through without error. There was no wafer when LLB was opened. Located the wafer in chamber P9 From tberg at snf.stanford.edu Thu Aug 4 06:31:10 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 4 Aug 2011 06:31:10 -0700 Subject: Shutdown epi2 SNF 2011-08-03 15:06:21: Wafer lost in chamber P9 Message-ID: Vented transfer chamber and removed wafer. Homed all axis.System back in inert idle. From tberg at snf.stanford.edu Mon Aug 8 06:01:47 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 8 Aug 2011 06:01:47 -0700 Subject: Comment epi2 SNF 2011-08-08 06:01:47: HCl is empty Message-ID: will be changing the cylinder From tberg at snf.stanford.edu Mon Aug 8 06:15:16 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 8 Aug 2011 06:15:16 -0700 Subject: Shutdown epi2 SNF 2011-08-08 06:15:15: HCL empty Message-ID: Changing Cylinder From tberg at stanford.edu Mon Aug 8 06:58:19 2011 From: tberg at stanford.edu (Ted Berg) Date: Mon, 08 Aug 2011 06:58:19 -0700 Subject: HCL Cylinder changed in leak check Message-ID: <4E3FEB7B.6020002@stanford.edu> Hello All, The HCL cylinder was empty this morning and i changed the cylinder and it is now in leak check. From tberg at snf.stanford.edu Mon Aug 8 06:59:49 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 8 Aug 2011 06:59:49 -0700 Subject: Comment epi2 SNF 2011-08-08 06:59:49: HCL cylinder changed in leak check Message-ID: From tberg at snf.stanford.edu Mon Aug 8 12:06:58 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 8 Aug 2011 12:06:58 -0700 Subject: Shutdown epi2 SNF 2011-08-08 06:15:15: HCL empty Message-ID: Cylinder changed, leak checked, back on line. Ran GEetchcoat From tberg at snf.stanford.edu Mon Aug 8 12:07:12 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 8 Aug 2011 12:07:12 -0700 Subject: Comment epi2 SNF 2011-08-08 06:01:47: HCl is empty Message-ID: Cylinder changed, leak checked, back on line. Ran GEetchcoat From tberg at snf.stanford.edu Mon Aug 8 12:07:22 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 8 Aug 2011 12:07:22 -0700 Subject: Comment epi2 SNF 2011-08-08 06:59:49: HCL cylinder changed in leak check Message-ID: Cylinder changed, leak checked, back on line. Ran GEetchcoat From maurice at snf.stanford.edu Mon Aug 8 16:43:41 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 8 Aug 2011 16:43:41 -0700 Subject: Problem epi2 SNF 2011-07-26 02:08:12: LLA and LLB issues Message-ID: logged From ehe at snf.stanford.edu Tue Aug 9 10:14:25 2011 From: ehe at snf.stanford.edu (ehe at snf.stanford.edu) Date: Tue, 9 Aug 2011 10:14:25 -0700 Subject: Problem epi2 SNF 2011-08-09 10:14:24: ran out of 100ppm Borane during run Message-ID: Borane 100ppm ran out on the third wafer recipe around 7:30am (DOP2 deviated >40%). Gauge in back reads <10psi. Is there anything that can be done to predict when gases will run out, so we don't waste substrates and epi2 time? From ehe at snf.stanford.edu Tue Aug 9 10:15:30 2011 From: ehe at snf.stanford.edu (ehe at snf.stanford.edu) Date: Tue, 9 Aug 2011 10:15:30 -0700 Subject: Comment epi2 SNF 2011-08-09 10:15:29: wafer stuck in chA due to faults Message-ID: Cannot retrieve. Please throw away half-processed wafer if you can get it out - recipe failed midstream due to 100ppm Borane running out. From ehe at snf.stanford.edu Tue Aug 9 10:16:52 2011 From: ehe at snf.stanford.edu (ehe at snf.stanford.edu) Date: Tue, 9 Aug 2011 10:16:52 -0700 Subject: Comment epi2 SNF 2011-08-09 10:16:51: good news Message-ID: ..the good news is that the first two wafers I ran were haze-free, which only seems to happen when the dome is clear. I ran 2 etchbacks before this run. From seymour at snf.stanford.edu Tue Aug 9 11:08:16 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 9 Aug 2011 11:08:16 -0700 Subject: Comment epi2 SNF 2011-08-09 11:08:15: changed 100 ppm diborane cylinder Message-ID: cylinder on leak check. From maurice at snf.stanford.edu Tue Aug 9 15:43:09 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 9 Aug 2011 15:43:09 -0700 Subject: Shutdown epi2 SNF 2011-08-09 15:43:08: Blown power supply Message-ID: Power supply not working after system power cycled. Ted and AMAT have been working to identify the location of the failure. We hope to have new boards to go into power supply by midday tomorrow. - We will update tomorrow. From tberg at snf.stanford.edu Wed Aug 10 13:08:08 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 10 Aug 2011 13:08:08 -0700 Subject: Shutdown epi2 SNF 2011-08-09 15:43:08: Blown power supply Message-ID: Replaced 24v 5v power supplies. Tested system. Running Etchcoat From tberg at snf.stanford.edu Wed Aug 10 13:08:31 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 10 Aug 2011 13:08:31 -0700 Subject: Comment epi2 SNF 2011-08-09 10:16:51: good news Message-ID: noted From tberg at snf.stanford.edu Wed Aug 10 13:08:51 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 10 Aug 2011 13:08:51 -0700 Subject: Comment epi2 SNF 2011-08-09 10:15:29: wafer stuck in chA due to faults Message-ID: moved wafer to llb From tberg at snf.stanford.edu Wed Aug 10 13:25:59 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 10 Aug 2011 13:25:59 -0700 Subject: Comment epi2 SNF 2011-08-09 11:08:15: changed 100 ppm diborane cylinder Message-ID: Leak check was fine back online From tberg at snf.stanford.edu Wed Aug 10 13:27:24 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 10 Aug 2011 13:27:24 -0700 Subject: Problem epi2 SNF 2011-08-09 10:14:24: ran out of 100ppm Borane during run Message-ID: Leak check was fine back online From grahamab at snf.stanford.edu Wed Aug 10 14:42:42 2011 From: grahamab at snf.stanford.edu (grahamab at snf.stanford.edu) Date: Wed, 10 Aug 2011 14:42:42 -0700 Subject: Shutdown epi2 SNF 2011-08-10 14:42:41: repeated bulb failure error Message-ID: tried resetting and got the same result after trying again. Maurice recommended shutting it down. chamber needs a chamber clean run before any wafer processing. From maurice at snf.stanford.edu Wed Aug 10 15:37:40 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 10 Aug 2011 15:37:40 -0700 Subject: Shutdown epi2 SNF 2011-08-10 14:42:41: repeated bulb failure error Message-ID: Elmer replaced 4 upper lamps From dongrip at snf.stanford.edu Sun Aug 14 01:27:20 2011 From: dongrip at snf.stanford.edu (dongrip at snf.stanford.edu) Date: Sun, 14 Aug 2011 01:27:20 -0700 Subject: Problem epi2 SNF 2011-08-14 01:27:20: DCS deviated by 100% Message-ID: DCS looks empty... From narii at snf.stanford.edu Sun Aug 14 14:24:31 2011 From: narii at snf.stanford.edu (narii at snf.stanford.edu) Date: Sun, 14 Aug 2011 14:24:31 -0700 Subject: Comment epi2 SNF 2011-08-14 14:24:31: Used Ge etch coat - Si for cleaning recipe Message-ID: Following Maurice's comment back in April, used Ge etch coat - Si for cleaning recipe instead. From tberg at snf.stanford.edu Mon Aug 15 07:33:44 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 15 Aug 2011 07:33:44 -0700 Subject: Comment epi2 SNF 2011-08-15 07:33:44: no DCS at this time Message-ID: From tberg at snf.stanford.edu Mon Aug 15 09:52:32 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 15 Aug 2011 09:52:32 -0700 Subject: Comment epi2 SNF 2011-08-15 07:33:44: no DCS at this time Message-ID: DCS is back on and reset From tberg at snf.stanford.edu Mon Aug 15 10:29:57 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 15 Aug 2011 10:29:57 -0700 Subject: Problem epi2 SNF 2011-08-14 01:27:20: DCS deviated by 100% Message-ID: DCS is reset ran geetchcoat flows were fine From ehe at snf.stanford.edu Tue Aug 16 21:25:55 2011 From: ehe at snf.stanford.edu (ehe at snf.stanford.edu) Date: Tue, 16 Aug 2011 21:25:55 -0700 Subject: Problem epi2 SNF 2011-08-16 21:25:54: wafers not detected in automatic Message-ID: Could not start recipe in automatic because load locks either had pump problems, door would not shut, or would not detect wafers. Solution was to manually create and move wafer into chA and start recipe in manual mode. From tberg at stanford.edu Wed Aug 17 13:36:25 2011 From: tberg at stanford.edu (Ted Berg) Date: Wed, 17 Aug 2011 13:36:25 -0700 Subject: Reservations released testing done Message-ID: <4E4C2649.3020708@stanford.edu> Hello All, Reservations released testing done. System is available. From tberg at snf.stanford.edu Mon Aug 22 06:11:49 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 22 Aug 2011 06:11:49 -0700 Subject: Problem epi2 SNF 2011-08-16 21:25:54: wafers not detected in automatic Message-ID: problem has not happened again From tberg at snf.stanford.edu Mon Aug 22 06:12:11 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 22 Aug 2011 06:12:11 -0700 Subject: Comment epi2 SNF 2011-08-14 14:24:31: Used Ge etch coat - Si for cleaning recipe Message-ID: noted From tberg at snf.stanford.edu Mon Aug 22 06:12:27 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 22 Aug 2011 06:12:27 -0700 Subject: Comment epi2 SNF 2011-06-14 10:40:52: recommend running multiple etches Message-ID: noted From edfei at snf.stanford.edu Tue Aug 23 16:14:55 2011 From: edfei at snf.stanford.edu (edfei at snf.stanford.edu) Date: Tue, 23 Aug 2011 16:14:55 -0700 Subject: Shutdown epi2 SNF 2011-08-23 16:14:54: main scrubber gas fault Message-ID: chamber will not reset after fire alarm From seymour at snf.stanford.edu Wed Aug 24 08:24:10 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 24 Aug 2011 08:24:10 -0700 Subject: Shutdown epi2 SNF 2011-08-23 16:14:54: main scrubber gas fault Message-ID: burnbox now operating correctly From cfchiang at snf.stanford.edu Wed Aug 24 17:32:16 2011 From: cfchiang at snf.stanford.edu (cfchiang at snf.stanford.edu) Date: Wed, 24 Aug 2011 17:32:16 -0700 Subject: Shutdown epi2 SNF 2011-08-24 17:32:16: Ch. A main surubber fault - gas flow problem Message-ID: encountered the same problem yesterday's user had. wasn't able to reset Ch. A. One of my wafer got stuck in ChA. From eenriquez at snf.stanford.edu Wed Aug 24 17:56:51 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 24 Aug 2011 17:56:51 -0700 Subject: Shutdown epi2 SNF 2011-08-24 17:32:16: Ch. A main surubber fault - gas flow problem Message-ID: Reset main scrubber. Unloaded the user's wafer and placed in her wafer box (slot 1). From junam at snf.stanford.edu Thu Aug 25 15:05:08 2011 From: junam at snf.stanford.edu (junam at snf.stanford.edu) Date: Thu, 25 Aug 2011 15:05:08 -0700 Subject: Problem epi2 SNF 2011-08-25 15:05:07: Ch A main scrubber fault Message-ID: "Ch A main scrubber fault" error occurred, and process aborted. System in inert idel state. From cfchiang at snf.stanford.edu Thu Aug 25 19:13:17 2011 From: cfchiang at snf.stanford.edu (cfchiang at snf.stanford.edu) Date: Thu, 25 Aug 2011 19:13:17 -0700 Subject: Comment epi2 SNF 2011-08-25 19:13:17: processed without problems Message-ID: I ran silicon deposition on two wafers and accumulated 12um on each without encountering any problem. From ehe at snf.stanford.edu Sat Aug 27 13:14:13 2011 From: ehe at snf.stanford.edu (ehe at snf.stanford.edu) Date: Sat, 27 Aug 2011 13:14:13 -0700 Subject: Problem epi2 SNF 2011-08-27 13:14:12: hazy growth Message-ID: insufficient etch backs? From cfchiang at snf.stanford.edu Sun Aug 28 15:03:02 2011 From: cfchiang at snf.stanford.edu (cfchiang at snf.stanford.edu) Date: Sun, 28 Aug 2011 15:03:02 -0700 Subject: Problem epi2 SNF 2011-08-28 15:03:02: ChA bulb failed in upper outer zone Message-ID: Encountered warning: "ChA SiD rp pressure not stabilized" a few time during etchcoat. Later "ChA bulb failed in upper outer zone" popped up and couldn't proceed. From junam at snf.stanford.edu Sun Aug 28 16:31:14 2011 From: junam at snf.stanford.edu (junam at snf.stanford.edu) Date: Sun, 28 Aug 2011 16:31:14 -0700 Subject: Problem epi2 SNF 2011-08-28 16:31:14: ChA bulb failed in upper outer zone Message-ID: had same error with the previous user. app. 1 min after seeting ChA into active idle state, this error occurrs repeatedly. ChA does not stay in active idle state, cannot proceed. From tberg at snf.stanford.edu Mon Aug 29 06:06:33 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 29 Aug 2011 06:06:33 -0700 Subject: Shutdown epi2 SNF 2011-08-29 06:06:32: bad lamps Message-ID: From tberg at snf.stanford.edu Mon Aug 29 08:08:32 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 29 Aug 2011 08:08:32 -0700 Subject: Shutdown epi2 SNF 2011-08-29 06:06:32: bad lamps Message-ID: Replaced bad lamps, DOME WAS CLEAR< ran geetch coat no problem From tberg at snf.stanford.edu Mon Aug 29 08:08:42 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 29 Aug 2011 08:08:42 -0700 Subject: Problem epi2 SNF 2011-08-28 15:03:02: ChA bulb failed in upper outer zone Message-ID: Replaced bad lamps, DOME WAS CLEAR< ran geetch coat no problem From tberg at snf.stanford.edu Mon Aug 29 08:08:55 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 29 Aug 2011 08:08:55 -0700 Subject: Problem epi2 SNF 2011-08-28 16:31:14: ChA bulb failed in upper outer zone Message-ID: Replaced bad lamps, DOME WAS CLEAR< ran geetch coat no problem From tberg at snf.stanford.edu Mon Aug 29 08:09:26 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 29 Aug 2011 08:09:26 -0700 Subject: Problem epi2 SNF 2011-08-27 13:14:12: hazy growth Message-ID: Replaced bad lamps, DOME WAS CLEAR< ran geetch coat no problem From tberg at snf.stanford.edu Mon Aug 29 08:09:52 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 29 Aug 2011 08:09:52 -0700 Subject: Problem epi2 SNF 2011-08-25 15:05:07: Ch A main scrubber fault Message-ID: burn box reset From tberg at stanford.edu Wed Aug 31 11:39:16 2011 From: tberg at stanford.edu (Ted Berg) Date: Wed, 31 Aug 2011 11:39:16 -0700 Subject: Reservations removed Message-ID: <4E5E7FD4.7040305@stanford.edu> Hello All, i am removing my reservation for tomorrow and Friday- Applied is not going to be here. Help yourself. Ted