Comment epi2 SNF 2011-08-01 18:11:36: LLA not venting to atm
tberg at snf.stanford.edu
tberg at snf.stanford.edu
Tue Aug 2 07:11:30 PDT 2011
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Comment epi2 SNF 2011-08-01 18:11:36: LLA not venting to atm
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Shutdown epi2 SNF 2011-08-03 15:06:21: Wafer lost in chamber P9
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LLa vented and cassettes exchanged to original positions
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Comment epi2 SNF 2011-08-01 18:11:36: LLA not venting to atm
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Shutdown epi2 SNF 2011-08-03 15:06:21: Wafer lost in chamber P9
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