Shutdown epi2 SNF 2011-08-03 15:06:21: Wafer lost in chamber P9

zpatel at snf.stanford.edu zpatel at snf.stanford.edu
Wed Aug 3 15:06:22 PDT 2011


Transfering the wafer from LLA to LLB went through without error. 
There was no wafer when LLB was opened.
Located the wafer in chamber P9




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