Shutdown epi2 SNF 2011-08-03 15:06:21: Wafer lost in chamber P9

tberg at snf.stanford.edu tberg at snf.stanford.edu
Thu Aug 4 06:31:10 PDT 2011


Vented transfer chamber and removed wafer. Homed all axis.System back in inert idle.




More information about the epi2-pcs mailing list