Problem epi2 SNF 2011-08-09 10:14:24: ran out of 100ppm Borane during run

ehe at snf.stanford.edu ehe at snf.stanford.edu
Tue Aug 9 10:14:25 PDT 2011


Borane 100ppm ran out on the third wafer recipe around 7:30am (DOP2 deviated >40%). Gauge in back reads <10psi.
Is there anything that can be done to predict when gases will run out, so we don't waste substrates and epi2 time?




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