Comment epi2 SNF 2011-08-09 10:15:29: wafer stuck in chA due to faults

ehe at snf.stanford.edu ehe at snf.stanford.edu
Tue Aug 9 10:15:30 PDT 2011


Cannot retrieve. Please throw away half-processed wafer if you can get it out - recipe failed midstream due to 100ppm Borane running out.




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