Comment epi2 SNF 2011-08-09 11:08:15: changed 100 ppm diborane cylinder
tberg at snf.stanford.edu
tberg at snf.stanford.edu
Wed Aug 10 13:25:59 PDT 2011
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Comment epi2 SNF 2011-08-09 11:08:15: changed 100 ppm diborane cylinder
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Leak check was fine back online
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Comment epi2 SNF 2011-08-09 11:08:15: changed 100 ppm diborane cylinder
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Shutdown epi2 SNF 2011-08-09 15:43:08: Blown power supply
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