Problem epi2 SNF 2011-08-09 10:14:24: ran out of 100ppm Borane during run
tberg at snf.stanford.edu
tberg at snf.stanford.edu
Wed Aug 10 13:27:24 PDT 2011
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Problem epi2 SNF 2011-08-09 10:14:24: ran out of 100ppm Borane during run
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Comment epi2 SNF 2011-08-09 10:15:29: wafer stuck in chA due to faults
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Leak check was fine back online
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Problem epi2 SNF 2011-08-09 10:14:24: ran out of 100ppm Borane during run
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Comment epi2 SNF 2011-08-09 10:15:29: wafer stuck in chA due to faults
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