Shutdown epi2 SNF 2011-08-10 14:42:41: repeated bulb failure error

grahamab at snf.stanford.edu grahamab at snf.stanford.edu
Wed Aug 10 14:42:42 PDT 2011


tried resetting and got the same result after trying again.  Maurice recommended shutting it down.  chamber needs a chamber clean run before any wafer processing.




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