Problem epi2 SNF 2011-08-14 01:27:20: DCS deviated by 100%
tberg at snf.stanford.edu
tberg at snf.stanford.edu
Mon Aug 15 10:29:57 PDT 2011
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Problem epi2 SNF 2011-08-14 01:27:20: DCS deviated by 100%
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Comment epi2 SNF 2011-08-14 14:24:31: Used Ge etch coat - Si for cleaning recipe
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DCS is reset ran geetchcoat flows were fine
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Problem epi2 SNF 2011-08-14 01:27:20: DCS deviated by 100%
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Comment epi2 SNF 2011-08-14 14:24:31: Used Ge etch coat - Si for cleaning recipe
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