Problem epi2 SNF 2011-08-16 21:25:54: wafers not detected in automatic

ehe at snf.stanford.edu ehe at snf.stanford.edu
Tue Aug 16 21:25:55 PDT 2011


Could not start recipe in automatic because load locks either had pump problems, door would not shut, or would not detect wafers. Solution was to manually create and move wafer into chA and start recipe in manual mode. 




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