Reservations released testing done
Ted Berg
tberg at stanford.edu
Wed Aug 17 13:36:25 PDT 2011
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Hello All, Reservations released testing done. System is available.
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Problem epi2 SNF 2011-08-16 21:25:54: wafers not detected in automatic
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Comment epi2 SNF 2011-06-14 10:40:52: recommend running multiple etches
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