Comment epi2 SNF 2011-06-14 10:40:52: recommend running multiple etches
tberg at snf.stanford.edu
tberg at snf.stanford.edu
Mon Aug 22 06:12:27 PDT 2011
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Reservations released testing done
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Shutdown epi2 SNF 2011-08-23 16:14:54: main scrubber gas fault
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noted
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Reservations released testing done
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Shutdown epi2 SNF 2011-08-23 16:14:54: main scrubber gas fault
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