Shutdown epi2 SNF 2011-08-24 17:32:16: Ch. A main surubber fault - gas flow problem

cfchiang at snf.stanford.edu cfchiang at snf.stanford.edu
Wed Aug 24 17:32:16 PDT 2011


encountered the same problem yesterday's user had. wasn't able to reset Ch. A. One of my wafer got stuck in ChA.




More information about the epi2-pcs mailing list